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There are MEMS temperature sensors, magnetic field sensors, radiation sensors, and more. There are microscopic motors that use electrostatic force instead of electromagnetic, micro gas valves ...
Electrostatic motors are now common in MEMS applications, but researchers at the University of Wisconsin and spinoff C-Motive Technologies have brought macroscale electrostatic motors back.
The devices used electrostatic actuation, and their architecture is illustrated in Fig. 1. The success of this core electromechanical design and manufacturing approach for MEMS DMs led to devices ...
New electrostatic actuators called Nano E-Drives are integrated ... "The market is highly interested in MEMS-based micro loudspeakers. Thanks to the successful financing, Arioso now has a very ...
Electrostatic nanoactuators utilize electric fields to generate ... complex environments and interact with their surroundings. Nanoactuators are used in MEMS devices to generate motion and actuation.