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There are MEMS temperature sensors, magnetic field sensors, radiation sensors, and more. There are microscopic motors that use electrostatic force instead of electromagnetic, micro gas valves ...
Electrostatic motors are now common in MEMS applications, but researchers at the University of Wisconsin and spinoff C-Motive Technologies have brought macroscale electrostatic motors back.
The devices used electrostatic actuation, and their architecture is illustrated in Fig. 1. The success of this core electromechanical design and manufacturing approach for MEMS DMs led to devices ...
Electrostatic nanoactuators utilize electric fields to generate ... complex environments and interact with their surroundings. Nanoactuators are used in MEMS devices to generate motion and actuation.
The 8051-managed chip implements AIST’s research on applying Micro-Electro-Mechanical Systems Electrostatic Field Sensors (MEMS-EFS) to detecting and measuring static charges. The system employs ...
In addition, his research team works with local and regional companies in the research and development of MEMS devices and applications of thermal, electrostatic and piezoelectric MEMS resonators, ...